LATTICE ORIENTATION OF DEFECTS IN ION-IMPLANTED DIAMOND

被引：16

作者：

BRAUNSTEIN, G ^{[1
]}

KALISH, R ^{[1
]}

机构：

[1] TECHNION ISRAEL INST TECHNOL,DEPT PHYS,IL-32000 HAIFA,ISRAEL

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90828-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：387 / 393

页数：7

共 9 条

[1] DEFECT STUDIES IN CRYSTALS BY MEANS OF CHANNELING [J].

BOGH, E .

CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :653-&

[2] CHANNELING ANALYSIS OF HIGH-TEMPERATURE ION-IMPLANTED DIAMOND [J].

BRAUNSTEIN, G ;

KALISH, R .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :691-697

[3] DAMAGE AND LATTICE LOCATION STUDIES IN HIGH-TEMPERATURE ION-IMPLANTED DIAMOND [J].

BRAUNSTEIN, G ;

KALISH, R .

APPLIED PHYSICS LETTERS, 1981, 38 (06) :416-418

[4] RADIATION-DAMAGE AND ANNEALING IN SB IMPLANTED DIAMOND [J].

BRAUNSTEIN, G ;

TALMI, A ;

KALISH, R ;

BERNSTEIN, T ;

BESERMAN, R .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 48 (1-4) :139-144

[5]

EISEN FH, 1973, CHANNELING, pCH14

[6] HIGH-TEMPERATURE ION-IMPLANTATION IN DIAMOND [J].

LEE, YH ;

BROSIOUS, PR ;

CORBETT, JW .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 50 (01) :237-242

[7] ENERGY-DEPENDENCE OF HE+ AND H+ CHANNELING IN SI OVERLAID WITH AU FILMS [J].

LUGUJJO, E ;

MAYER, JW .

PHYSICAL REVIEW B, 1973, 7 (05) :1782-1791

[8] DECHANNELING MEASUREMENTS OF DEFECT DEPTH PROFILES AND EFFECTIVE CROSS-CHANNEL DISTRIBUTION OF MISALIGNED ATOMS IN ION-IRRADIATED GOLD [J].

PRONKO, PP .

NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :249-259

[9] CARBON INTERSTITIAL IN DIAMOND LATTICE [J].

WEIGEL, C ;

PEAK, D ;

CORBETT, JW ;

WATKINS, GD ;

MESSMER, RP .

PHYSICAL REVIEW B, 1973, 8 (06) :2906-2915

← 1 →