VISUALIZATION OF INHOMOGENEITIES OF CRYSTAL-GROWTH BY OPTICAL OBSERVATIONS
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作者:
DONECKER, J
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DONECKER, J
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来源:
DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS AND DEVICES
|
1994年
/
135期
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暂无
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Optical diffraction is used to map the distances of striations over macroscopic regions. The diffraction is due to striation-induced changes in transmission, refractive indices or surface shape after etching. In different modes of the experiment one obtains a survey of the dominant striation distances, areas of stationary growth, areas of striations with a certain distance and the distribution of distances. Examples for mixed oxide crystals and InP as well as requirements and limitations are discussed.
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页码:311 / 314
页数:4
相关论文
共 6 条
[1]
BROZEL MR, 1987, DEFECT RECOGNITION I, V2, P225
机构:
CATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDSCATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDS
FRIGERI, C
WEYHER, JL
论文数: 0引用数: 0
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CATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDSCATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDS
WEYHER, JL
ZANOTTI, L
论文数: 0引用数: 0
h-index: 0
机构:
CATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDSCATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDS
机构:
CATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDSCATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDS
FRIGERI, C
WEYHER, JL
论文数: 0引用数: 0
h-index: 0
机构:
CATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDSCATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDS
WEYHER, JL
ZANOTTI, L
论文数: 0引用数: 0
h-index: 0
机构:
CATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDSCATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE 3,6525 ED NIJMEGEN,NETHERLANDS