SCANNING ELECTRON-BEAM LITHOGRAPHY FOR FABRICATION OF MAGNETIC-BUBBLE CIRCUITS

被引：18
作者：
CHANG, THP [1 ]
HATZAKIS, M [1 ]
WILSON, AD [1 ]
SPETH, AJ [1 ]
KERN, A [1 ]
LUHN, H [1 ]
机构：
[1] IBM CORP, THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1976年 / 20卷 / 04期
关键词：
D O I：
10.1147/rd.204.0376
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：376 / 388
页数：13
相关论文
共 50 条
  • [31] Optimization of diffraction grating profiles in fabrication by the electron-beam lithography
    Okano, M
    Yotsuya, T
    Kikuta, H
    Hirai, Y
    Yamamoto, K
    DIFFRACTIVE OPTICS AND MICRO-OPTICS, PROCEEDINGS VOLUME, 2002, 75 : 200 - 202
  • [32] Fabrication of ordered GaAs nanowhiskers using electron-beam lithography
    I. P. Soshnikov
    D. E. Afanas’ev
    G. E. Cirlin
    V. A. Petrov
    E. M. Tanklevskaya
    Yu. B. Samsonenko
    A. D. Bouravlev
    A. I. Khrebtov
    V. M. Ustinov
    Semiconductors, 2011, 45 : 822 - 827
  • [33] Fabrication of Ordered GaAs Nanowhiskers Using Electron-Beam Lithography
    Soshnikov, I. P.
    Afanas'ev, D. E.
    Cirlin, G. E.
    Petrov, V. A.
    Tanklevskaya, E. M.
    Samsonenko, Yu. B.
    Bouravlev, A. D.
    Khrebtov, A. I.
    Ustinov, V. M.
    SEMICONDUCTORS, 2011, 45 (06) : 822 - 827
  • [34] Data preparation and fabrication of DOE using electron-beam lithography
    Babin, SV
    Danilov, VA
    OPTICS AND LASERS IN ENGINEERING, 1998, 29 (4-5) : 307 - 324
  • [35] CURRENT-ACCESS MAGNETIC-BUBBLE CIRCUITS
    BOBECK, AH
    BLANK, SL
    BUTHERUS, AD
    CIAK, FJ
    STRAUSS, W
    BELL SYSTEM TECHNICAL JOURNAL, 1979, 58 (06): : 1453 - 1540
  • [36] FABRICATION OF OPTOELECTRONIC DEVICES ON ALGAAS USING ELECTRON-BEAM LITHOGRAPHY
    STAUFFER, JM
    OPPLIGER, Y
    VASEY, F
    MICROELECTRONIC ENGINEERING, 1991, 13 (1-4) : 193 - 196
  • [37] Electron-beam and emerging lithography for the magnetic recording industry
    Driskill-Smith, AAG
    EMERGING LITHOGRAPHIC TECHNOLOGIES VIII, 2004, 5374 : 16 - 30
  • [38] FABRICATION OF ULTRASMALL TUNNEL-JUNCTIONS BY ELECTRON-BEAM LITHOGRAPHY
    KOESTER, SJ
    BAZAN, G
    BERNSTEIN, GH
    POROD, W
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (03) : 1918 - 1921
  • [39] Electron-beam lithography of nanostructures at the tips of scanning probe cantilevers
    Forrer, L.
    Kamber, A.
    Knoll, A.
    Poggio, M.
    Braakman, F. R.
    AIP ADVANCES, 2023, 13 (03)
  • [40] Optimization of diffraction grating profiles in fabrication by electron-beam lithography
    Okano, M
    Kikuta, H
    Hirai, Y
    Yamamoto, K
    Yotsuya, T
    APPLIED OPTICS, 2004, 43 (27) : 5137 - 5142
12345