SCANNING ELECTRON-BEAM LITHOGRAPHY FOR FABRICATION OF MAGNETIC-BUBBLE CIRCUITS

被引：18

|

作者：

CHANG, THP ^{[1
]}

HATZAKIS, M ^{[1
]}

WILSON, AD ^{[1
]}

SPETH, AJ ^{[1
]}

KERN, A ^{[1
]}

LUHN, H ^{[1
]}

机构：

[1] IBM CORP, THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1976年 / 20卷 / 04期

关键词：

D O I：

10.1147/rd.204.0376

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

收藏

页码：376 / 388

页数：13

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