SILICON TIPS WITH DIAMOND PARTICLES ON THEM - NEW FIELD EMITTERS

被引:37
作者
GIVARGIZOV, EI
机构
[1] Russian Acad of Sciences, Moscow
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 02期
关键词
D O I
10.1116/1.587959
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new approach to preparation of effective field emitters is proposed. The approach consists in deposition of diamond particles on high aspect ratio silicon tips. Field-emission measurements of such objects have given rather low effective work function values, from 0.3 to 1.2 eV.
引用
收藏
页码:414 / 417
页数:4
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