DOPING REACTION OF PH3 AND B2H6 WITH SI(100)

被引：139
|
作者：
YU, ML [1 ]
VITKAVAGE, DJ [1 ]
MEYERSON, BS [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 12期
关键词：
D O I：
10.1063/1.336708
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4032 / 4037
页数：6
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