DOPING REACTION OF PH3 AND B2H6 WITH SI(100)

被引：139

作者：

YU, ML ^{[1
]}

VITKAVAGE, DJ ^{[1
]}

MEYERSON, BS ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 12期

关键词：

D O I：

10.1063/1.336708

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4032 / 4037

页数：6

共 14 条

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