DOPING REACTION OF PH3 AND B2H6 WITH SI(100)

被引：139

作者：

YU, ML ^{[1
]}

VITKAVAGE, DJ ^{[1
]}

MEYERSON, BS ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 12期

关键词：

D O I：

10.1063/1.336708

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4032 / 4037

页数：6

共 50 条

[1] Reaction mechanisms of B2H6, Si2H6,PH3 and H2Se with CuO
Watanabe, T
Suzuki, T
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1997, 105 (09) : 779 - 783
[2] COMPARISON BETWEEN THE ADSORPTION OF PH3 AND B2H6 ON SI SURFACES AS RELATED TO THE CVD OF SI
YU, ML
VITKAVAGE, DJ
MEYERSON, BS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 861 - 862
[3] Effects of in situ doping from B2H6 and PH3 on hydrogen desorption and the low-temperature growth mode of Si on Si(100) by remote plasma enhanced chemical vapor deposition
Doris, B
Fretwell, J
Erskine, JL
Banerjee, SK
APPLIED PHYSICS LETTERS, 1997, 70 (21) : 2819 - 2821
[4] DYNAMIC ELECTRON TRANSFERS IN B2H6 AND CU(PH3)2(BH4)
HORI, K
TACHIBANA, A
THEORETICA CHIMICA ACTA, 1986, 70 (03): : 153 - 163
[5] IS B(CH3)3 AN INTERESTING ALTERNATIVE TO B2H6 FOR A-SI-H P-DOPING
WU, ZG
LLORET, A
SIEFERT, JM
CABARROCAS, PRI
EQUER, B
AMORPHOUS SILICON TECHNOLOGY - 1989, 1989, 149 : 291 - 296
[6] Decomposition of B2H6 on Ni(100)
Desrosiers, RM
Greve, DW
Gellman, AJ
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (04): : 2181 - 2189
[7] DISSOCIATION OF B2H6 AND ADSORPTION OF THE FRAGMENTS OF B2H6 ON THE STEPPED Ge(100) SURFACE
Turkmenoglu, Mustafa
Katircioglu, Senay
SURFACE REVIEW AND LETTERS, 2012, 19 (03)
[8] PREPARATION AND STRUCTURE OF AMMONIA AND ALKYLAMINE ADDITION COMPOUNDS OF PHOSPHINE DIBORANE B2H6 PH3 NR3
GILJE, JW
MORSE, KW
PARRY, RW
INORGANIC CHEMISTRY, 1967, 6 (10) : 1761 - &
[9] Mass spectrometry study of the gas pyrolysis of PH3 and a PH3/Si2H6 mixture
1600, (26):
[10] A MASS-SPECTROMETRY STUDY OF THE GAS PYROLYSIS OF PH3 AND A PH3/SI2H6 MIXTURE
SIMON, J
FEURER, R
REYNES, A
MORANCHO, R
JOURNAL OF ANALYTICAL AND APPLIED PYROLYSIS, 1993, 26 (01) : 27 - 36

← 1 2 3 4 5 →