SIMPLIFIED 3-DIMENSIONAL COMPUTER-SIMULATION OF LPCVD

被引：0

作者：

WANG, J ^{[1
]}

ZHANG, S ^{[1
]}

机构：

[1] FUDAN UNIV,INST MAT SCI,SHANGHAI,PEOPLES R CHINA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C355 / C355

页数：1

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