MATERIAL EFFECTS ON THE CRACKING EFFICIENCY OF MOLECULAR-BEAM EPITAXY ARSENIC CRACKING FURNACES

被引：9
|
作者：
LEE, RL
SCHAFFER, WJ
CHAI, YG
LIU, D
HARRIS, JS
机构：
[1] VARIAN ASSOCIATES,CORP RES CTR,PALO ALTO,CA 94303
[2] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 02期
关键词：
D O I：
10.1116/1.583375
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：568 / 570
页数：3
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