PRACTICAL ASPECTS OF MICROFABRICATION IN THE 100 NM REGIME

被引：26

作者：

KERN, DP

HOUZEGO, PJ

COANE, PJ

CHANG, THP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582641

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1096 / 1100

页数：5

共 8 条

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[6]

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[8]

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