SOME CHARACTERISTICS AND PHYSICAL-PROPERTIES OF BORON IMPLANTED HIGH-RESISTIVITY LAYERS IN SILICON

被引：0
作者：
KASSABOV, JD [1 ]
VOUTOV, MP [1 ]
VELCHEV, NB [1 ]
机构：
[1] INST MICROELECTR,SOFIA,BULGARIA
来源：
DOKLADI NA BOLGARSKATA AKADEMIYA NA NAUKITE | 1975年 / 28卷 / 09期
关键词：
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
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页码：1167 / 1170
页数：4
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