X-RAY EXTINCTION CONTRAST TOPOGRAPHY OF SILICON STRAINED BY THIN SURFACE FILMS

被引：62

|

作者：

MEIERAN, ES

BLECH, IA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1965年 / 36卷 / 10期

关键词：

D O I：

10.1063/1.1702943

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3162 / &

相关论文

共 50 条

[1] HIGH-TEMPERATURE X-RAY TOPOGRAPHY OF SI WAFERS STRAINED BY THIN SURFACE FILMS
BLECH, IA
MEIERAN, ES
APPLIED PHYSICS LETTERS, 1966, 9 (06) : 245 - &
[2] Imaging defects in strained-silicon thin films by glancing-incidence x-ray topography
Black, D. R.
Woicik, J. C.
Erdtmann, M.
Langdo, T. A.
APPLIED PHYSICS LETTERS, 2006, 88 (22)
[3] X-RAY STRESS TOPOGRAPHY OF THIN FILMS ON GERMANIUM AND SILICON
SCHWUTTK.GH
HOWARD, JK
JOURNAL OF APPLIED PHYSICS, 1968, 39 (03) : 1581 - &
[4] X-RAY SURFACE TOPOGRAPHY OF DIFFUSION-GENERATED DISLOCATIONS IN SILICON (CONTRAST EXTINCTION BORON DIFFUSION E)
BLECH, IA
MEIERAN, ES
SELLO, H
APPLIED PHYSICS LETTERS, 1965, 7 (06) : 176 - &
[5] DISLOCATION CONTRAST IN X-RAY REFLECTION TOPOGRAPHY OF STRAINED HETEROSTRUCTURES
SPIRKL, W
TANNER, BK
WHITEHOUSE, C
BARNETT, SJ
CULLIS, AG
JOHNSON, AD
KEIR, A
USHER, B
CLARK, GF
HAGSTON, W
HOGG, CR
LUNN, B
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1994, 70 (03): : 531 - 548
[6] METHOD FOR THE DETECTION OF DISLOCATIONS IN SILICON BY X-RAY EXTINCTION CONTRAST
NEWKIRK, JB
PHYSICAL REVIEW, 1958, 110 (06): : 1465 - 1466
[7] AREA AND MIXED CONTRAST IN X-RAY TOPOGRAPHS OF SILICON CRYSTALS STRAINED BY SIO2 FILMS
GAJDA, WJ
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 5 (03): : K143 - &
[8] COMMENT ON X-RAY STRESS TOPOGRAPHY OF THIN FILMS ON GERMANIUM
SEGMULLE.A
LIGHT, TB
SCHWUTTK.GH
HOWARD, JK
JOURNAL OF APPLIED PHYSICS, 1969, 40 (04) : 1972 - &
[9] CHARACTERIZATION OF SILICON SURFACE LAYER STRUCTURE BY X-RAY TOPOGRAPHY
WANG, P
PINK, F
APPLIED SPECTROSCOPY, 1968, 22 (04) : 372 - &
[10] X-ray phase-contrast topography to measure the surface stress and bulk strain in a silicon crystal
Massa, E.
Sasso, C. P.
Fretto, M.
Martino, L.
Mana, G.
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 2020, 53 : 1195 - 1202

← 1 2 3 4 5 →