SENSITIVITY IMPROVEMENT OF WIRELESS PRESSURE SENSOR BY INCORPORATING A SAW REFLECTIVE DELAY LINE

被引:17
|
作者
Oh, Haekwan [1 ]
Wang, Weng [1 ]
Lee, Keekeun [1 ]
Park, Ikmo [1 ]
Yang, Sang Sik [1 ]
机构
[1] Ajou Univ, Div Elect Engn, Suwon 443749, South Korea
关键词
coupling of modes; interdigital transducer; LiNbO3; piezoelectric substrate; reflective delay line; surface acoustic wave; wireless pressure sensor; temperature compensation;
D O I
10.21307/ijssis-2017-329
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
this paper presents a wireless surface acoustic wave (SAW) pressure sensor on 41 degrees YX LiNbO3 for tire pressure monitoring system (TPMS) application, in which a reflective delay line composed of an interdigital transducer (IDT) and several reflectors was used as the sensor element. Using the coupling of modes (COM), the SAW reflective delay line was simulated, and the optimal design parameters were determined. The fabricated 2.4GHz SAW sensor was wirelessly characterized by the network analyzer. Sharp reflection peaks, few spurious signals, and relatively high signal-to-noise (S/ N) ratio were observed. High sensitivity of 2.9 deg/kPa and good linearity were observed.
引用
收藏
页码:940 / 954
页数:15
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