ORIENTATION AND ION-IMPLANTED TRANSVERSE EFFECTS IN SELF-ALIGNED GAAS-MESFETS

被引:0
作者
CHEN, CH
PECZALSKI, A
SHUR, MS
CHUNG, HK
机构
[1] HONEYWELL INC,HONEYWELL SYST & RES CTR,MINNEAPOLIS,MN 55413
[2] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1470 / 1481
页数:12
相关论文
共 22 条
[1]   PIEZOELECTRIC EFFECTS IN GAAS-FETS AND THEIR ROLE IN ORIENTATION-DEPENDENT DEVICE CHARACTERISTICS [J].
ASBECK, PM ;
LEE, CP ;
CHANG, MCF .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (10) :1377-1380
[2]   STRESS IN CHEMICAL-VAPOR-DEPOSITED SIO2 AND PLASMA-SINX FILMS ON GAAS AND SI [J].
BLAAUW, C .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) :5064-5068
[3]   ROLE OF THE PIEZOELECTRIC EFFECT IN DEVICE UNIFORMITY OF GAAS INTEGRATED-CIRCUITS [J].
CHANG, MF ;
LEE, CP ;
ASBECK, PM ;
VAHRENKAMP, RP ;
KIRKPATRICK, CG .
APPLIED PHYSICS LETTERS, 1984, 45 (03) :279-281
[4]  
CHEN CH, 1986, IEEE T ELECTRON DEV, V33, P792, DOI 10.1109/T-ED.1986.22570
[5]   THEORETICAL CONSIDERATIONS ON LATERAL SPREAD OF IMPLANTED IONS [J].
FURUKAWA, S ;
ISHIWARA, H ;
MATSUMURA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (02) :134-+
[6]  
GHANDHI SK, 1983, VLSI FABRICATION PRI, P345
[7]  
GIBBONS JF, 1975, PROJECTED RANGE STAT
[8]  
KANAMORI M, 1985, P GAAS IC S MONTEREY, P49
[9]   THE EFFECT OF STRESS ON THE REDISTRIBUTION OF IMPLANTED IMPURITIES IN GAAS [J].
KASAHARA, J ;
KATO, Y ;
ARAI, M ;
WATANABE, N .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (11) :2275-2279
[10]   INFLUENCE OF N+-LAYER-GATE GAP ON SHORT-CHANNEL EFFECTS OF GAAS SELF-ALIGNED MESFETS (SAINT) [J].
KATO, N ;
MATSUOKA, Y ;
OHWADA, K ;
MORIYA, S .
IEEE ELECTRON DEVICE LETTERS, 1983, 4 (11) :417-419