PRODUCTION OF A DENSE METAL-ION STREAM FOR ION COATING BY A PULSED VACUUM-ARC IN A STRONG MAGNETIC-FIELD

被引：2

作者：

NAKAGAWA, Y ^{[1
]}

ITAMI, M ^{[1
]}

机构：

[1] OSAKA MUNICIPAL TECH RES INST,OSAKA 536,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 05期

关键词：

D O I：

10.1116/1.578594

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A dense metal-ion stream (approximately 1 X 10(18)/shot) was produced by a high-current, long-pulse vacuum arc (approximately 2 kA, approximately 25 ms) in a strong magnetic field. The ion stream was transported 40 cm by the magnetic field to a substrate and then deposited on it. Fast film formation (approximately 200 angstrom/shot), such as TiN and TiC films, was achieved by this device using a Ti electrode discharge in N2 or CH4 gas.

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页码：2472 / 2476

页数：5

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