ELECTROCHEMICAL TUNNEL ETCHING OF ALUMINUM

被引:149
作者
ALWITT, RS
UCHI, H
BECK, TR
ALKIRE, RC
机构
[1] ELECTROCHEM TECHNOL CORP,SEATTLE,WA 98107
[2] UNIV ILLINOIS,DEPT CHEM ENGN,URBANA,IL 61801
关键词
D O I
10.1149/1.2115495
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:13 / 17
页数:5
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