NEW HIGH-EFFICIENCY QUASI-CONTINUOUS OPERATION OF A KRF(B-]X) EXCIMER LAMP EXCITED BY MICROWAVE-DISCHARGE

被引：52
作者：
KUMAGAI, H
OBARA, M
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 26期
关键词：
D O I：
10.1063/1.101039
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2619 / 2621
页数：3
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