MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION

被引：213
作者：
MARTIN, PJ
NETTERFIELD, RP
SAINTY, WG
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 01期
关键词：
D O I：
10.1063/1.332871
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：235 / 241
页数：7
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