MEASUREMENTS OF LAYER THICKNESSES AND REFRACTIVE-INDEXES IN HIGH-ENERGY ION-IMPLANTED GAAS AND GAP

被引:25
作者
KACHARE, AH
SPITZER, WG
FREDRICKSON, JE
EULER, FK
机构
[1] UNIV SO CALIF,DEPT PHYS,LOS ANGELES,CA 90007
[2] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90007
[3] CALIF STATE UNIV LONG BEACH,DEPT PHYS ASTRON,LONG BEACH,CA 90840
[4] USAF,ROME AIR DEV CTR,HANSCOM AFB,MA 01731
关键词
D O I
10.1063/1.322564
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:5374 / 5381
页数:8
相关论文
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