GUIDELINES FOR CONSTRUCTION OF LOW-PRESSURE GAS MANIFOLDS

被引：2

作者：

PAULICK, TC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 04期

关键词：

Compendex;

D O I：

10.1116/1.571858

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1032 / 1036

页数：5

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