CRYSTALLIZATION AND DECOMPOSITION OF AMORPHOUS SILICON-ALUMINUM FILMS

被引:53
|
作者
KOSTER, U [1 ]
WEISS, P [1 ]
机构
[1] RUHR UNIV,INST WERKSTOFFE,D-463 BOCHUM,FED REP GER
关键词
D O I
10.1016/0022-3093(75)90126-X
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:359 / 368
页数:10
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