MECHANISTIC STUDIES OF THE CHEMICAL-VAPOR-DEPOSITION OF GOLD

被引:0
作者
PAUL, A
BENT, BE
SEIDLER, PF
机构
[1] COLUMBIA UNIV,DEPT CHEM,NEW YORK,NY 10027
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1994年 / 207卷
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
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页码:57 / COLL
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