A SILICON MICROVALVE WITH COMBINED ELECTROMAGNETIC/ELECTROSTATIC ACTUATION

被引：46
作者：
BOSCH, D
HEIMHOFER, B
MUCK, G
SEIDEL, H
THUMSER, U
WELSER, W
机构：
[1] Deutsche Aerospace AG, D-8000 Munich 80
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷
关键词：
D O I：
10.1016/0924-4247(93)80116-X
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the design, fabrication and performance of a silicon microvalve for small gas flows. It consists of two micromachined components which are bonded together. One part contains the gas flow inlet, the other part a deflectable silicon membrane. This membrane may be activated by a combination of electromagnetic and electrostatic forces. This principle is especially useful for minimizing the power consumption. The main experimental results are as follows: The. maximum pressure against which the valve can fully operate is 160 mbar. With this pressure, a flow of up to 3 ml/min can be controlled. Typically, current pulses of 200 mA and voltage amplitudes of 30 V are applied for electromagnetic and electrostatic actuation, respectively. The switching time is below 0.4 ms.
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页码：684 / 692
页数：9
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