METAL POLYIMIDE INTERFACE - A TITANIUM REACTION-MECHANISM

被引:163
作者
OHUCHI, FS
FREILICH, SC
机构
[1] E. I. DuPont de Nemours and Company, Central Research and Development Department, Experimental Station, Wilmington
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573450
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Chemical bonding and reaction of in situ deposited Ti on a series of polyimide surfaces have been investigated. X-ray photoelectron spectroscopy has been used to probe site specific information for bonding of various functional groups of polyimide molecules, while ultraviolet photoelectron spectroscopy has been applied to monitor the change of the Ti d bands and the polyimide molecular orbitals near the Fermi energy as a function of overlayer coverage. At low coverages, the polyimide surfaces react strongly with Ti and strong charge transfer via the carbonyl group occurs. As the coverage increases, a Ti-C bond formation has been identified. A detailed mechanism for the reaction of Ti with polyimides is described, and this mechanism is confirmed by model pyromellitimide reaction with Ti° suspension in solution. © 1986, American Vacuum Society. All rights reserved.
引用
收藏
页码:1039 / 1045
页数:7
相关论文
共 12 条
[1]   PHOTOEMISSION SPECTROSCOPY STUDY OF ALUMINUM-POLYIMIDE INTERFACE [J].
BARTHA, JW ;
HAHN, PO ;
LEGOUES, F ;
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :1390-1393
[2]  
BUCHWALTER PL, 1984, POLYIMIDES SYNTHESIS, V1, P537
[3]  
CHANG CC, 1974, CHARACTERIZATION SOL, P536
[4]  
CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564
[5]   AN XPS AND TEM STUDY OF INTRINSIC ADHESION BETWEEN POLYIMIDE AND CR FILMS [J].
CHOU, NJ ;
DONG, DW ;
KIM, J ;
LIU, AC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (10) :2335-2340
[6]   CHEMICAL BONDING AT THE POLYIMIDE SURFACE [J].
HAHN, PO ;
RUBLOFF, GW ;
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :756-760
[7]  
HAHN PO, 1985, MATER RES SOC S P, V40, P251
[8]  
HENRICH VE, 1978, PHYS REV B, V17, P4120
[9]   CHEMICAL BONDING AND REACTION AT METAL POLYMER INTERFACES [J].
HO, PS ;
HAHN, PO ;
BARTHA, JW ;
RUBLOFF, GW ;
LEGOUES, FK ;
SILVERMAN, BD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :739-745
[10]   SYNTHESIS OF UNSYMMETRICAL OLEFINS BY TITANIUM(0) INDUCED MIXED CARBONYL COUPLING - SOME COMMENTS ON MECHANISM OF PINACOL REACTION [J].
MCMURRY, JE ;
KREPSKI, LR .
JOURNAL OF ORGANIC CHEMISTRY, 1976, 41 (24) :3929-3930