METAL POLYIMIDE INTERFACE - A TITANIUM REACTION-MECHANISM

被引：163

作者：

OHUCHI, FS

FREILICH, SC

机构：

[1] E. I. DuPont de Nemours and Company, Central Research and Development Department, Experimental Station, Wilmington

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573450

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Chemical bonding and reaction of in situ deposited Ti on a series of polyimide surfaces have been investigated. X-ray photoelectron spectroscopy has been used to probe site specific information for bonding of various functional groups of polyimide molecules, while ultraviolet photoelectron spectroscopy has been applied to monitor the change of the Ti d bands and the polyimide molecular orbitals near the Fermi energy as a function of overlayer coverage. At low coverages, the polyimide surfaces react strongly with Ti and strong charge transfer via the carbonyl group occurs. As the coverage increases, a Ti-C bond formation has been identified. A detailed mechanism for the reaction of Ti with polyimides is described, and this mechanism is confirmed by model pyromellitimide reaction with Ti° suspension in solution. © 1986, American Vacuum Society. All rights reserved.

引用

页码：1039 / 1045

页数：7

共 12 条

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