GROWTH MECHANISMS OF DIAMOND CRYSTALS AND FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION

Diamond crystals and films were prepared either by hot-filament-assisted or microwave-plasma-assisted CVD techniques. Depending on the technique used and on the synthesis parameters, modifications of diamond crystal habit were observed and are analyzed by considering the growth mechanisms of (111) and (100) faces. Consequently, film surfaces with either predominantly (111) faces or only (100) faces were obtained. Effects of surface reconstruction, defect inclusions and etching are considered in view of modifying the relative 〈111〉 and 〈100〉 growth rates and thus the crystal and film surface morphologies. © 1992.