LAYER-BY-LAYER DESIGN METHOD FOR SOFT-X-RAY MULTILAYERS

被引：75
|
作者：
YAMAMOTO, M
NAMIOKA, T
机构：
[1] Research Institute for Scientific Measurements, Tohoku University, Sendai, 980, 2-1-1 Katahira, Aoba-ku
[2] Optical Research Section, NASA Goddard Space Flight Center, Greenbelt, MD, 20771
来源：
APPLIED OPTICS | 1992年 / 31卷 / 10期
关键词：
X-RAYS; MULTILAYER MIRROR; THIN FILMS;
D O I：
10.1364/AO.31.001622
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new design method effective for a nontransparent system has been developed for soft-x-ray multilayers with the aid of graphic representation of the complex amplitude reflectance in a Gaussian plane. The method provides an effective means of attaining the absolute maximum reflectance on a layer-by-layer basis and also gives clear insight into the evolution of the amplitude reflectance on a multilayer as it builds up. An optical criterion is derived for the selection of a proper pair of materials needed for designing a high-reflectance multilayer. Some examples are given to illustrate the usefulness of this design method.
引用
收藏
页码：1622 / 1630
页数：9
相关论文
共 50 条
  • [1] A succinct design method of soft x-ray multi-layer mirror
    Song, LM
    Hu, JS
    INSTRUMENTS FOR OPTICS AND OPTOELECTRONIC INSPECTION AND CONTROL, 2000, 4223 : 149 - 152
  • [2] OPTICAL DESIGN FOR SOFT-X-RAY PROJECTION LITHOGRAPHY
    WATANABE, Y
    SUZUKI, M
    MOCHIZUKI, N
    NIIBE, M
    FUKUDA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3053 - 3057
  • [3] Self-healing properties of layer-by-layer assembled multilayers
    Skorb, Ekaterina V.
    Andreeva, Daria V.
    POLYMER INTERNATIONAL, 2015, 64 (06) : 713 - 723
  • [4] Covalent Layer-by-Layer Assembly of Redox-Active Polymer Multilayers
    Feng, Xueling
    Curnurcu, Aysegul
    Sui, Xiaofeng
    Song, Jing
    Hernpenius, Mark A.
    Vancso, G. Julius
    LANGMUIR, 2013, 29 (24) : 7257 - 7265
  • [5] Voltammetric Studies of Dendrimer Multilayers: Layer-by-Layer Assembly of Metal-Peptide Dendrimers Multilayers
    Appoh, Francis E.
    Kraatz, Heinz-Bernhard
    JOURNAL OF APPLIED POLYMER SCIENCE, 2009, 111 (02) : 709 - 723
  • [6] Effect of Precursor-Layer Surface Charge on the Layer-by-Layer Assembly of Polyelectrolyte/Nanoparticle Multilayers
    Peng, Chunqing
    Thio, Yonathan S.
    Gerhardt, Rosario A.
    LANGMUIR, 2012, 28 (01) : 84 - 91
  • [7] Layer-by-layer assemblies in nanoporous templates: nano-organized design and applications of soft nanotechnology
    Azzaroni, Omar
    Lau, K. H. Aaron
    SOFT MATTER, 2011, 7 (19) : 8709 - 8724
  • [8] PM IRRAS spectroelectrochemistry of layer-by-layer self-assembled polyelectrolyte multilayers
    Tagliazucchi, Mario
    Mendez De Leo, Lucila P.
    Cadranel, Alejandro
    Baraldo, Luis M.
    Volker, Edgar
    Bonazzola, Cecilia
    Calvo, Ernesto J.
    Zamlynny, Vlad
    JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 2010, 649 (1-2) : 110 - 118
  • [9] Spontaneous Surface Flattening via Layer-by-Layer Assembly of Interdiffusing Polyelectrolyte Multilayers
    Kim, Young Hun
    Lee, Yong Man
    Park, Juhyun
    Ko, Min Jae
    Park, Jong Hyeok
    Jung, Woncheol
    Yoo, Pil J.
    LANGMUIR, 2010, 26 (22) : 17756 - 17763
  • [10] ON THE ORIGIN OF THE SOFT-X-RAY BACKGROUND
    WANG, QD
    MCCRAY, R
    ASTROPHYSICAL JOURNAL, 1993, 409 (02) : L37 - L40
12345