APPLICATION OF SCANNING ELECTRON ACOUSTIC MICROSCOPY (SEAM) TO THE CHARACTERIZATION OF SEMICONDUCTING MATERIALS AND DEVICES

被引：0
作者：
BALK, LJ
KULTSCHER, N
机构：
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1987年 / 87期
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D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
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页码：675 / 684
页数：10
相关论文
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