ULTRAVIOLET INDUCED METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION GROWTH OF GAAS

被引：29
作者：
BALK, P [1 ]
HEINECKE, H [1 ]
PUTZ, N [1 ]
PLASS, C [1 ]
LUTH, H [1 ]
机构：
[1] RHEIN WESTFAL TH AACHEN,INST PHYS 2,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.573839
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：711 / 715
页数：5
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