THERMALLY EXCITED SILICON MICROACTUATORS

被引：177

作者：

RIETHMULLER, W

BENECKE, W

机构：

[1] Fraunhofer-Inst fuer, Mikrostrukturtechnik, Berlin, West, Ger, Fraunhofer-Inst fuer Mikrostrukturtechnik, Berlin, West Ger

来源：

关键词：

D O I：

10.1109/16.2528

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：758 / 763

页数：6

共 20 条

[1]

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[2]

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[3]

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[5]

KLOECK B, 1987, 4TH INT C SOL STAT S, P116

[6]

MULLER RS, 1985, 1984 IEEE ELECTROTEC, P56

[7]

Petersen K. E., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P2

[8] SILICON AS A MECHANICAL MATERIAL [J].

PETERSEN, KE .

[9] SILICON TORSIONAL SCANNING MIRROR [J].

PETERSEN, KE .

[10] MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON [J].

PETERSEN, KE .