COMPACT INTERFEROMETER FOR ACCURATE DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS

被引：11

作者：

SHAMIR, J ^{[1
]}

机构：

[1] TECHNION ISRAEL INST TECHNOL,FAC ELECT ENGN,HAIFA,ISRAEL

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1976年 / 9卷 / 06期

关键词：

D O I：

10.1088/0022-3735/9/6/022

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：499 / 503

页数：5

共 50 条

[31] DETERMINATION OF THICKNESS AND OPTICAL-CONSTANTS OF THIN-FILMS FROM PHOTOMETRIC AND ELLIPSOMETRIC MEASUREMENTS
ELIZALDE, E
FRIGERIO, JM
RIVORY, J
APPLIED OPTICS, 1986, 25 (24) : 4557 - 4561
[32] ACCURATE DETERMINATION OF OPTICAL-CONSTANTS OF ABSORBING MATERIALS - MEASUREMENTS OF TRANSMITTANCE AND REFLECTANCE OF THIN-FILMS ON PARTIALLY METALLIZED SUBSTRATES
HJORTSBERG, A
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[33] GENERAL TECHNIQUE FOR INVERSION OF FORMULAS FOR OPTICAL-CONSTANTS OF THIN-FILMS
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[34] THE ACCURACY OF SOME MIXED PHOTOMETRIC AND POLARIMETRIC FUNCTIONS IN THE DETERMINATION OF THE OPTICAL-CONSTANTS OF THIN-FILMS
WARD, L
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[35] INFLUENCE OF THICKNESS INHOMOGENEITY ON THE DETERMINATION OF OPTICAL-CONSTANTS OF AMORPHOUS-SILICON THIN-FILMS
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[36] DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS FROM MEASUREMENTS OF NORMAL INCIDENCE REFLECTANCE AND TRANSMITTANCE
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JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1977, 10 (13) : 1855 - 1861
[37] DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS FROM MEASUREMENTS OF REFLECTANCE AND TRANSMITTANCE AT NORMAL INCIDENCE
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JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1972, 5 (04) : 852 - &
[38] NUMERICAL-METHOD FOR THE ELLIPSOMETRIC DETERMINATION OF OPTICAL-CONSTANTS AND THICKNESS OF THIN-FILMS WITH MICROCOMPUTERS
EASWARAKHANTHAN, T
MICHEL, C
RAVELET, S
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[39] OPTICAL-CONSTANTS OF CD1-XMNXTE THIN-FILMS
MIOTKOWSKI, I
KIERZEKPECOLD, E
MIOTKOWSKA, S
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[40] OPTICAL-CONSTANTS OF AGI THIN-FILMS IN REGION OF EXCITON BAND
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