COMPACT INTERFEROMETER FOR ACCURATE DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS

被引：11

作者：

SHAMIR, J ^{[1
]}

机构：

[1] TECHNION ISRAEL INST TECHNOL,FAC ELECT ENGN,HAIFA,ISRAEL

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1976年 / 9卷 / 06期

关键词：

D O I：

10.1088/0022-3735/9/6/022

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：499 / 503

页数：5

共 50 条

[1] DETERMINATION OF OPTICAL-CONSTANTS OF REAL THIN-FILMS
SZCZYRBOWSKI, J
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1978, 11 (04) : 583 - 593
[2] NEW METHOD FOR DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS
WU, MH
FARHAT, NH
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1975, 65 (10) : 1195 - 1195
[3] A COMPARISON OF METHODS FOR THE DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS
DELPOZO, JM
DIAZ, L
THIN SOLID FILMS, 1992, 209 (01) : 137 - 144
[4] A NEW METHOD FOR THE DETERMINATION OF THE OPTICAL-CONSTANTS OF THIN-FILMS
STICHAUER, L
GAVOILLE, G
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1992, 133 (02): : 547 - 553
[5] DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS BY MEASUREMENTS OF INTENSITIES
HACMAN, D
KEUTSCHEGGER, A
OPTIK, 1973, 37 (04): : 391 - 403
[6] ACCURATE DETERMINATION OF THE OPTICAL-CONSTANTS OF ABSORBING THIN-FILMS DEPOSITED ON THICK SEMITRANSPARENT SUBSTRATES
GALIBERT, G
KONAN, K
ELGRANDI, R
CALAS, J
MARTIN, JL
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 5 (01): : 37 - 42
[7] ANOMALOUS OPTICAL-CONSTANTS OF THIN-FILMS
ROBERTS, EFI
ROSS, D
SURFACE SCIENCE, 1976, 56 (01) : 425 - 439
[8] OPTICAL-CONSTANTS OF SILVER THIN-FILMS
SHKLYARE.IN
KORNEEVA, TI
OPTICS AND SPECTROSCOPY-USSR, 1971, 31 (02): : 144 - &
[9] AUTOMATIC-DETERMINATION OF THE OPTICAL-CONSTANTS OF INHOMOGENEOUS THIN-FILMS
BORGOGNO, JP
LAZARIDES, B
PELLETIER, E
APPLIED OPTICS, 1982, 21 (22): : 4020 - 4029
[10] PRECISION IN THE ELLIPSOMETRIC DETERMINATION OF THE OPTICAL-CONSTANTS OF VERY THIN-FILMS
VUYE, G
LOPEZRIOS, T
APPLIED OPTICS, 1982, 21 (16): : 2968 - 2971

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