MONTE-CARLO SIMULATION OF THE PARTICLE-TRANSPORT PROCESS IN SPUTTER DEPOSITION

被引：99
作者：
MOTOHIRO, T
TAGA, Y
机构：
来源：
THIN SOLID FILMS | 1984年 / 112卷 / 02期
关键词：
D O I：
10.1016/0040-6090(84)90493-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：161 / 173
页数：13
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