LARGE-AREA UNIFORM EVAPORATED THIN-FILMS

被引：15
|
作者：
RAMSAY, JV [1 ]
NETTERFIELD, RP [1 ]
MUGRIDGE, EG [1 ]
机构：
[1] CSIRO, DIV PHYS, NATL STANDARDS LAB, SYDNEY 2008, AUSTRALIA
来源：
VACUUM | 1974年 / 24卷 / 08期
关键词：
D O I：
10.1016/0042-207X(74)93077-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：337 / 340
页数：4
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