SUBMICRON ELECTRICALLY CONDUCTING WIRES PRODUCED IN POLYIMIDE BY ULTRAVIOLET-LASER IRRADIATION

被引：31

作者：

PHILLIPS, HM ^{[1
]}

WAHL, S ^{[1
]}

SAUERBREY, R ^{[1
]}

机构：

[1] RICE UNIV, RICE QUANTUM INST, HOUSTON, TX 77251 USA

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 20期

关键词：

D O I：

10.1063/1.109300

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An array of permanently electrically conducting lines with a width of 0.5 mum and a period of 0.9 mum has been produced in polyimide with a KrF laser using a holographic technique. The electrical resistivity of these submicron structures shows an ohmic characteristic and has a value of less than 0.5 OMEGA cm, while the resistivity perpendicular to the structures exceeds this value by more than a factor of 10(7). The temperature dependence of the conductivity in these wires is found to be similar to that found for macroscopic regions of polyimide which show laser induced conductivity.

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页码：2572 / 2574

页数：3

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