SIZE EFFECT OF A QUARTZ OSCILLATOR ON ITS CHARACTERISTICS AS A FRICTION VACUUM GAUGE

被引：20
作者：
HIRATA, M
KOKUBUN, K
ONO, M
NAKAYAMA, K
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.573011
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1742 / 1745
页数：4
相关论文
共 8 条
[1]  
BECKER W, 1960, VAKUUM TECHNIK, V9, P48
[2]  
DUSHMAN S, 1914, PHYS REV, V5, P212
[3]   VIBRATING RIBBON PRESSURE GAUGE [J].
HOBSON, JP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (05) :557-&
[4]  
KIEFER H, 1955, Z ANGEW PHYS, V7, P48
[5]   A BENDING AND STRETCHING MODE CRYSTAL-OSCILLATOR AS A FRICTION VACUUM GAUGE [J].
KOKUBUN, K ;
HIRATA, M ;
MURAKAMI, H ;
TODA, Y ;
ONO, M .
VACUUM, 1984, 34 (8-9) :731-735
[6]   DESIGN AND PERFORMANCE OF A QUARTZ OSCILLATOR VACUUM GAUGE WITH A CONTROLLER [J].
ONO, M ;
HIRATA, M ;
KOKUBUN, K ;
MURAKAMI, H ;
TAMURA, F ;
HOJO, H ;
KAWASHIMA, H ;
KYOGOKU, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :1746-1749
[7]  
PACEY DJ, 1959, VACUUM, V39, P261
[8]  
SCHWARTZ HJ, 1956, VACUUM S T COMMITTEE, P37
1