ROLE OF INTEGRATED LATERAL STRESS IN SURFACE DEFORMATION OF HE-IMPLANTED SURFACES

被引：149
作者：
EERNISSE, EP [1 ]
PICRAUX, ST [1 ]
机构：
[1] SANDIA LABS,ALBUQUERQUE,NM 87115
来源：
JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 01期
关键词：
D O I：
10.1063/1.323332
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：9 / 17
页数：9
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