共 50 条
- [2] DEPTH PROFILING OF TRACE CONSTITUENTS USING SECONDARY ION MASS-SPECTROMETRY JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1988, 93 (03): : 390 - 392
- [3] ON THE SPATIAL-RESOLUTION OF 2-DIMENSIONAL DOPING PROFILES AS MEASURED USING SECONDARY-ION MASS-SPECTROMETRY TOMOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01): : 116 - 124
- [7] LIMITING FACTORS FOR SECONDARY-ION MASS-SPECTROMETRY PROFILING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01): : 269 - 275
- [9] RECONSTRUCTED 2-DIMENSIONAL DOPING PROFILES FROM MULTIPLE ONE-DIMENSIONAL SECONDARY ION MASS-SPECTROMETRY MEASUREMENTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (01): : 369 - 379