ON THE EFFECT OF DOPING IMPURITIES ON THE FORMATION OF ROD-LIKE DEFECTS IN SILICON

被引：1
|
作者：
KALININ, VV
GERASIMENKO, NN
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1984年 / 86卷 / 01期
关键词：
D O I：
10.1002/pssa.2210860119
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：185 / 190
页数：6
相关论文
共 50 条
  • [1] ROD-LIKE DEFECTS IN SILICON - COESITE OR HEXAGONAL SILICON
    BENDER, H
    VANHELLEMONT, J
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1988, 107 (02): : 455 - 467
  • [2] ROD-LIKE DEFECTS IN ION-IMPLANTED SILICON
    WU, WK
    WASHBURN, J
    CRYSTAL LATTICE DEFECTS, 1977, 7 (01): : 39 - 43
  • [3] Electrical and optical properties of rod-like defects in silicon
    Goss, JP
    Briddon, PR
    Eberlein, TAG
    Jones, R
    Pinho, N
    Blumenau, AT
    Oberg, S
    APPLIED PHYSICS LETTERS, 2004, 85 (20) : 4633 - 4635
  • [4] ROD-LIKE DEFECTS IN CZOCHRALSKI SILICON CRYSTAL AND THEIR TRANSFORMATION
    SOROKIN, LM
    MALYSHEV, KL
    SITNIKOVA, AA
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1991, (117): : 221 - 226
  • [5] {111} and {311} rod-like defects in silicon ion implanted silicon
    Chou, CT
    Cockayne, DJH
    Zou, J
    Kringhoj, P
    Jagadish, C
    1996 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES, PROCEEDINGS, 1996, : 305 - 308
  • [6] THE ROLE OF SILICON SELF-INTERSTITIALS IN THE FORMATION OF THERMALLY INDUCED ROD-LIKE DEFECTS IN CZ SILICON
    REICHE, M
    BREITENSTEIN, O
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1987, 101 (02): : K97 - &
  • [7] RADIATION-INDUCED ROD-LIKE DEFECTS IN SILICON AND GERMANIUM
    BARTSCH, H
    HOEHL, D
    KASTNER, G
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 83 (02): : 543 - 551
  • [8] STRUCTURE AND BEHAVIOR OF ROD-LIKE DEFECTS DURING ANNEALING IN SILICON
    BARCH, K
    KHAIDENRAIKH, I
    KHEL, D
    KESTNER, G
    VERNER, P
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1987, 51 (09): : 1600 - 1605
  • [9] Infrared transmission investigations of rod-like defects in multicrystalline silicon
    Lawerenz, A
    Ghosh, M
    Kremmer, K
    Klemm, V
    Müller, A
    Möller, HJ
    GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, 2004, 95-96 : 501 - 505
  • [10] EARLY STAGES OF ROD-LIKE DEFECT FORMATION IN SILICON
    WERNER, P
    REICHE, M
    HEYDENREICH, J
    MICROSCOPY OF SEMICONDUCTING MATERIALS 1993, 1993, (134): : 37 - 40
12345