OPTICAL DESIGN FOR SOFT-X-RAY PROJECTION LITHOGRAPHY

被引：6

作者：

WATANABE, Y

SUZUKI, M

MOCHIZUKI, N

NIIBE, M

FUKUDA, Y

机构：

[1] Canon Research Center, Atsugi, Kanagawa

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 11B期

关键词：

SOFT X-RAY PROJECTION LITHOGRAPHY; MULTILAYER MIRROR; AMPLITUDE REFLECTANCE; PHASE SHIFT; DISTORTION; POINT SPREAD FUNCTION; MODULATION TRANSFER FUNCTION;

D O I：

10.1143/JJAP.30.3053

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated the effect of soft X-ray multilayer mirrors on the characteristics of image formation and determined that the phase shift of the X-ray on the mirror plays an important role in image formation as well as reflectivity. Under such a condition that the effect on the characteristics of image formation can be neglected, an optical system that has a resolution of 0.18-mu-m and 0.25-mu-m at the wavelength of 5 nm and 13 nm, respectively, and distortion of less than 0.01-mu-m in a whole exposure field of 20 x 40 mm2. The necessary surface accuracy of mirrors and tolerance of setting mirrors are discussed.

引用

页码：3053 / 3057

页数：5

共 6 条

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