共 8 条
[1]
ASAAD WN, 1958, P PHYS SOC LOND, V72, P369
[2]
CHAO SS, APPLICATIONS SURFACE
[3]
HOLLINGER G, 1980, PHYSICS MOS INSULATO, P87
[4]
NEAR-NEIGHBOR CHEMICAL BONDING EFFECTS ON SI ATOM NATIVE BONDING DEFECTS IN SILICON-NITRIDE AND SILICON DIOXIDE INSULATORS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (04)
:1122-1128
[5]
Philipp H. R., 1972, J NONCRYST SOLIDS, V8, P627
[6]
RAMAKER DE, 1978, PHYSICS SIO2 ITS INT, P99
[7]
REMOTE PLASMA ENHANCED CVD DEPOSITION OF SILICON-NITRIDE AND OXIDE FOR GATE INSULATORS IN (INDIUM, GA)AS FET DEVICES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1985, 3 (03)
:867-872
[8]
THEORY OF KLL AUGER ENERGIES INCLUDING STATIC RELAXATION
[J].
PHYSICAL REVIEW A,
1973, 7 (05)
:1520-1528