DETECTION OF ALIGNMENT SIGNALS FOR FOCUSED ION-BEAM LITHOGRAPHY

被引：6
作者：
MORIMOTO, H
SASAKI, Y
ONODA, H
KATO, T
机构：
来源：
APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 09期
关键词：
D O I：
10.1063/1.95880
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：898 / 900
页数：3
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