SOFT-X-RAY PHASE MODULATION MULTILAYER DISPERSIVE ELEMENT

被引：0

作者：

YUAN, LX

FAN, ZX

CUL, MQ

FU, SJ

机构：

[1] ACAD SINICA,INST HIGH ENERGY PHYS,BEIJING 100039,PEOPLES R CHINA

[2] UNIV SCI & TECHNOL CHINA,HEFEI 230026,PEOPLES R CHINA

来源：

OPTICAL ENGINEERING | 1995年 / 34卷 / 05期

关键词：

MULTILAYER; SOFT X-RAY PHASE GRATING; CHARACTERIZATION; DIFFRACTION EFFICIENCY;

D O I：

10.1117/12.201632

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Multilayer phase gratings have higher diffraction efficiency than amplitude gratings in the soft x-ray region. The authors give a detailed description of the fabrication, characterization, and performance of soft x-ray phase modulation multilayer laminar gratings. The experimental results are discussed and compared with theory.

引用

页码：1508 / 1511

页数：4

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