SYNTHESIS AND CHARACTERIZATION OF VOLATILE BISMUTH BETA-DIKETONATE COMPOUNDS FOR METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION OF THIN-FILMS

The synthesis of several new Bi(III) beta-diketonate complexes is described. In this method the chelates of the anions of 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedione (H(fod)) and 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (H(hfa)) are formed by refluxing 3 equiv of the protonated ligand with 1 equiv of triphenylbismuth. The same reaction with 1,1,1-trifluoro-2,4-pentanedione (H(tfa)) produced a mixed beta-diketonate/phenyl ligand complex. The reaction products were characterized by thermogravimetric analysis, mass spectrometry, nuclear magnetic resonance spectrometry, and gas chromatography/mass spectrometry. Formation of bismuth-containing thin films using metal-organic chemical vapor deposition was demonstrated using the Bi(III) complex of fod. The films produced using this method were determined to contain 76% bismuth by Auger analysis, and no fluorine contamination was observed.