SLIDING LIFE ENHANCEMENT OF A WS2 SPUTTERED FILM BY ION-BEAM MIXING

被引:40
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HIRANO, M
MIYAKE, S
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10.1063/1.96057
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O59 [应用物理学];
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页码:683 / 685
页数:3
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共 7 条
[1]   BOMBARDMENT-DIFFUSED COATINGS AND ION-BEAM MIXING [J].
DEARNALEY, G .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 63 (1-4) :25-37
[2]  
HIRANO M, UNPUB T ASME
[3]   ION-IMPLANTATION THROUGH ALUMINUM THIN-FILM DEPOSITED ON IRON [J].
IWAKI, M ;
OKABE, Y ;
TAKAHASHI, K ;
YOSHIDA, K .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :941-945
[4]   ION-BEAM MIXING OF METAL-SEMICONDUCTOR EUTECTIC SYSTEMS [J].
LAU, SS ;
TSAUR, BY ;
VONALLMEN, M ;
MAYER, JW ;
STRITZKER, B ;
WHITE, CW ;
APPLETON, B .
NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :97-105
[5]   ION-BEAM-INDUCED REACTIONS IN METAL-SEMICONDUCTOR AND METAL-METAL THIN-FILM STRUCTURES [J].
MAYER, JW ;
TSAUR, BY ;
LAU, SS ;
HUNG, LS .
NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :1-13
[6]   FRICTIONAL AND MORPHOLOGICAL PROPERTIES OF AU-MOS2 FILMS SPUTTERED FROM A COMPACT TARGET [J].
SPALVINS, T .
THIN SOLID FILMS, 1984, 118 (03) :375-384
[7]   TRIBOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS IN RELATION TO FILM MORPHOLOGY [J].
SPALVINS, T .
THIN SOLID FILMS, 1980, 73 (02) :291-297