HALIDE AND CHLORIDE TRANSPORT VAPOR-PHASE DEPOSITION OF INGAASP AND GAAS

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BEUCHET, G
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SEMICONDUCTORS AND SEMIMETALS | 1985年 / 22卷
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：261 / 298
页数：38
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