INFRARED-ABSORPTION SPECTRA AND COMPOSITIONS OF EVAPORATED SILICON-OXIDES (SIOX)

被引：230
作者：
NAKAMURA, M [1 ]
MOCHIZUKI, Y [1 ]
USAMI, K [1 ]
ITOH, Y [1 ]
NOZAKI, T [1 ]
机构：
[1] RIKAGAKU KENKYU SHO,WAKO,SAITAMA 351,JAPAN
来源：
SOLID STATE COMMUNICATIONS | 1984年 / 50卷 / 12期
关键词：
D O I：
10.1016/0038-1098(84)90292-8
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：1079 / 1081
页数：3
相关论文
共 9 条
  • [1] VIBRATIONAL SPECTRA OF VITREOUS SILICA GERMANIA AND BERYLLIUM FLUORIDE
    BELL, RJ
    BIRD, NF
    DEAN, P
    [J]. JOURNAL OF PHYSICS PART C SOLID STATE PHYSICS, 1968, 1 (02): : 299 - &
  • [2] THE FORMATION OF COSMIC GRAINS - AN EXPERIMENTAL AND THEORETICAL-STUDY
    DONN, B
    HECHT, J
    KHANNA, R
    NUTH, J
    STRANZ, D
    ANDERSON, AB
    [J]. SURFACE SCIENCE, 1981, 106 (1-3) : 576 - 581
  • [3] CRYSTALLOGRAPHIC STUDY OF SEMI-INSULATING POLYCRYSTALLINE SILICON (SIPOS) DOPED WITH OXYGEN-ATOMS
    HAMASAKI, M
    ADACHI, T
    WAKAYAMA, S
    KIKUCHI, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) : 3987 - 3992
  • [4] HOWSON RP, 1971, THIN SOLID FILMS, V9, P109
  • [5] HE-3 ACTIVATION-ANALYSIS OF OXYGEN IN SILICON-NITRIDE FILMS ON SILICON-WAFERS
    NOZAKI, T
    IWAMOTO, M
    USAMI, K
    MUKAI, K
    HIRAIWA, A
    [J]. JOURNAL OF RADIOANALYTICAL CHEMISTRY, 1979, 52 (02): : 449 - 459
  • [6] Philipp H. R., 1972, J NONCRYST SOLIDS, V8, P627
  • [7] OPTICAL PROPERTIES OF NON-CRYSTALLINE SI, SIO, SIOX AND SIO2
    PHILIPP, HR
    [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1971, 32 (08) : 1935 - &
  • [8] COMPARISON OF PROPERTIES OF DIELECTRIC FILMS DEPOSITED BY VARIOUS METHODS
    PLISKIN, WA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (05): : 1064 - 1081
  • [9] Ritter E., 1962, J MOD OPTIC, V9, P197, DOI [10.1080/713826414, DOI 10.1080/713826414]
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