SURFACE CONTRIBUTIONS TO THE 2-LAYER STRUCTURE IN THE PLASMA DEPOSITION OF A-SI-H

被引：18

作者：

SACHER, E

KLEMBERGSAPIEHA, J

WERTHEIMER, MR

SCHREIBER, HP

GROLEAU, R

机构：

[1] ECOLE POLYTECH,DEPT GENIE CHIM,MONTREAL H3C 3A7,QUEBEC,CANADA

[2] UNIV MONTREAL,DEPT PHYS,MONTREAL H3C 3J7,QUEBEC,CANADA

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1984年 / 49卷 / 04期

关键词：

D O I：

10.1080/13642818408246519

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L47 / L52

页数：6

共 33 条

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