SPUTTERING POLYMER-FILMS BY ION-BOMBARDMENT

被引：0
|
作者：
FILATOV, VN
SYSOEV, AA
KOLOTYRKIN, VM
TUZOV, LS
SHCHUROV, AN
机构：
来源：
HIGH ENERGY CHEMISTRY | 1982年 / 16卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：218 / 221
页数：4
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