SPUTTERING POLYMER-FILMS BY ION-BOMBARDMENT

被引：0

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作者：

FILATOV, VN

SYSOEV, AA

KOLOTYRKIN, VM

TUZOV, LS

SHCHUROV, AN

机构：

来源：

HIGH ENERGY CHEMISTRY | 1982年 / 16卷 / 03期

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D O I：

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中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

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页码：218 / 221

页数：4

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