INTERACTION OF AL LAYERS WITH POLYCRYSTALLINE SI

被引：80

作者：

NAKAMURA, K

NICOLET, MA

MAYER, JW

BLATTNER, RJ

EVANS, CA

机构：

[1] CALTECH,PASADENA,CA 91125

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 11期

关键词：

D O I：

10.1063/1.321530

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4678 / 4684

页数：7

共 18 条

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